WAFER HANDLING ROBOT

iselRobotik IWH

WITH 2-LINK HEAVY DUTY ARM AND BODY SERIES 1

Features
- excellent structural rigidity and precision
- maximum reliability
- top mount (TA) or bottom mount (BA) versions available
- customized solutions
- absolute or incremental encoders
- seamless integration with prealigner, linear guide and other peripheral components
- ISO 1 clean room environment compatible
- MTBF: >70,000 operating hours

Specifications
-Repeatability
T ±0.02°
R ±0.02 mm
Z ±0.02 mm
-Working range
Z 10", 13", 17", 21"
radial 10", 12", 14", 16", 20"
theta 500°

-Payload up to 3 kg*

-Maximum speed
T 360°/s
R 1,000 mm/s
Z 450 mm/s
Predpfx Aeqhrabsd Uec

-Power supply
115 - 230 VAC
50 - 60 Hz
550 VA (ADVANCED)

-Main interface
RS-232 [DB9], Ethernet [RJ-45]

-Weight
approx. 25 - 32 kg